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Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

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https://hal.umontpellier.fr/hal-01675126
Contributor : Philippe Falque <>
Submitted on : Tuesday, June 8, 2021 - 10:51:49 AM
Last modification on : Sunday, June 13, 2021 - 3:08:00 AM

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Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, et al.. Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”. Journal of Vacuum Science and Technology A, American Vacuum Society, 2017, 35 (1), ⟨10.1116/1.4971389⟩. ⟨hal-01675126⟩

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