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Nano films de Diamond Like Carbon : Elaboration par pulvérisation cathodique magnétron et caractérisations de l'influence des paramètres de dépôt surleurs structures et leurs propriétés

Abstract : Diamond Like Carbon (DLC) materials can be described as metastable forms of amorphous carbon composed of both sp2 hybridized atoms, as in graphite, and sp3, as in diamond. This allows the properties of these materials to be tuned by varying their structures, making them very attractive for different fields of research and industry.The goal of this thesis is to study thoroughly the properties of DLC materials deposited under conditions compatible with the microelectronics industry. The challenge here is to see whether DLC films with thickness below a hundred nanometers exhibit the same ranges of properties as those presented in the literature.A magnetron-sputtering reactor was selected due to its simplicity, reliability, versatility and low cost, making it one of the most widely used deposition methods in the microelectronics industry. This method has many accessible input parameters, such as the deposition power, the temperature of the substrate, the composition of the plasma and the addition of post-ionization, which allow as many study parameters using only one equipment. Thus, the effects of each of these parameters on the properties of the deposited DLCs have been studied.To that end, the structure of the films was studied by X-rays photoelectrons spectrometry and by Raman spectroscopy. The coupling of these two methods is relevant because each method gives complementary insight of the material structure. XPS allows, via the measurement of the bond energy, to determine the proportion of each hybridization, the sp3 bonds being more energetic than the sp2 hybridized one. The analysis of the characteristic Raman parameters of carbon, the D and G peaks, can provide information on the structure of sp2 bonds, in particular on the presence of graphitic rings, their number and their size by studying the ID/IG ratio.The optoelectronic and thermal properties of these films, as well as the mechanical stress generated by the deposition method, were then investigated according to the various deposition parameters. Particular attention was paid to the effect of variations in thickness, particularly on the characterization of ultra-thin films of only a few nanometers in thickness. These cross-studies of the properties as a function of the film structure and of the deposition parameters allows a better understanding of nanoscale DLC films, leading to the development of different deposition recipes offering specific properties responding to the different targeted specifications.This was implemented in projects carried out jointly with CEA applicative departments. One of these projects consisted of the production of ultrasonic micro-transducers by transferring a 10 nm thick carbon membrane onto an array of micrometric-sized cavities. The use of DLC allow these devices to produce and detect ultrasonic waves outside of the mechanical resonance.
Keywords : Dlc Pvd Raman Xps
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Submitted on : Tuesday, June 8, 2021 - 2:01:07 PM
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  • HAL Id : tel-03253718, version 1

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Matthieu Matringe. Nano films de Diamond Like Carbon : Elaboration par pulvérisation cathodique magnétron et caractérisations de l'influence des paramètres de dépôt surleurs structures et leurs propriétés. Science des matériaux [cond-mat.mtrl-sci]. Université Grenoble Alpes [2020-..], 2021. Français. ⟨NNT : 2021GRALI028⟩. ⟨tel-03253718⟩

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